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Ultra High Vacuum Robot

Customizable to Your Specifications

  1. Engineered Systems
  2. Ultra High Vacuum Robot

Trust Automation offers a customizable 300mm Ultra High Vacuum Robot that is a precision, in-chamber, wafer handling and positioning system configured for metrology processes. The UHV Robot is capable of X and Y precision to +/- 2.5 μm over the full wafer envelope and less than +/- 0.2 μm for the 50mm z axis. Coordinated with the 3 axes of the UHV robot an additional 5 axes of related motion can be incorporated.

The UHV robot interfaces with the chamber and application specific end effector (EE) offering a range of capabilities that can be customized to meet varying requirements and demands of any OEM semiconductor equipment manufacturer.

We provide ground-up custom solutions for our customers. Call us or fill out the form below to discuss your specific needs and we’ll design and manufacture a system for you.

Get A Quote

Technical Advantages

  • High reliability
  • Custom multiple axes
  • Configurable to maximize efficiency
  • Customizable form and fit for specific manufacturing applications
  • High accuracy
  • High throughput
  • Increase product quality and reliability
  • Superior customer service support

Applications

  • Semiconductor
    • Wafer metrology / inspection
    • Wafer transfer
    • Wafer handling
  • A three axis independent stage can be coordinated to the three axis robot. Anode stage will interface with chamber and end effector
  • Consists of up to eight axes of motion coordinated or independent; R (X), Y, Z, e (rotation), and roll
  • Flat Panel: Inspection, Transfer, Handling

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  • Standard Motors
    • SE500 Motor Series
    • SE600 Motor Series
    • SE700 Motor Series
  • Custom Motors
  • Standard Linear Drives
    • TA105 Linear Drive
    • TA115 Linear Drive
    • TA305 Linear Drive
    • TA310 Linear Drive
    • TA330 Linear Drive
    • TA333 Linear Drive
    • C-2271 Dual Axis Linear Drive/Controller
    • TA620 Single Axis Linear Drive/Controller
    • TA600 Motion Controller
  • Custom Linear Drives
  • Standard Digital Drives
    • TA2215 Digital Drive
    • TA2230 Digital Drive
    • TA600 Motion Controller
  • Custom Digital Drives
  • Standard Systems
    • D-1041 8-Axis Controller
    • Ultra High Vacuum Robot
  • Custom Systems

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2019 Trust Automation, Inc., All Rights Reserved.
143 Suburban Road San Luis Obispo, CA 93401-1101, 805-544-0761, [email protected]
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